The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 23, 2016

Filed:

Sep. 03, 2013
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Yoichi Otsuka, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/16 (2006.01); H01J 49/26 (2006.01); H01J 49/04 (2006.01); H01J 49/00 (2006.01);
U.S. Cl.
CPC ...
H01J 49/16 (2013.01); H01J 49/0463 (2013.01); H01J 49/165 (2013.01); H01J 49/26 (2013.01); H01J 49/0004 (2013.01);
Abstract

An ionization device includes an irradiation unit to irradiate at least a region of a surface of a sample with laser light to scatter particles contained on the surface of the sample, a liquid holding unit having a distal end to hold a liquid on an outer periphery of the distal end, an extract electrode to extract ionized ions, and a voltage application unit to apply a voltage between the liquid holding unit and the extract electrode to generate the ions from the liquid held on the outer periphery of the distal end. The region and the distal end are disposed so as not to make contact with each other but to be in close proximity to each other so that the liquid held on the outer periphery of the distal end attracts particles desorbed from the sample as a result of irradiation with the laser light.


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