The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Mar. 11, 2008
Joerg Vetter, Bergisch-Gladbach, DE;
Joerg Vetter, Bergisch-Gladbach, DE;
OERLIKON SURFACE SOLUTIONS AG, TRUEBBACH, Truebbach, CH;
Abstract
The invention relates to a vacuum arc source (), including ring-like magnetic field source () and a cathode body () with an vaporization material () as a cathode () for the production of an arc discharge on an vaporization surface () of the cathode (). In this arrangement the cathode body () is bounded in an axial direction in a first axial direction by a cathode base () and in a second axial direction by the vaporization surface () and the ring-like magnetic () is arranged polarised parallel or anti-parallel and concentric to a surface normal () of the vaporization surface (). In accordance with the invention a magnetic field enhancement ring () is arranged on a side remote from the vaporization surface () at a pre-determinable second spacing (A) in front of the cathode base (). The invention further relates to an arc vaporization chamber () with an arc vaporization source ().