The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Sep. 19, 2013
Applicant:
Sumitomo Precision Products Co., Ltd., Hyogo, JP;
Inventor:
Tokiko Misaki, Hyogo, JP;
Assignee:
Sumitomo Precision Products Co., Ltd., Hyogo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/10 (2006.01); B29D 11/00 (2006.01); G02B 26/08 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0816 (2013.01); B81C 1/00 (2013.01); G02B 26/0858 (2013.01);
Abstract
A portion of an SiOlayeron a peripheral portionof an actuator body portionis left on the surface of the actuator body portionwhen it is etched so as to extend over the outside of the piezoelectric elementWhen the third resist maskcovering the actuator body portionand the mirror portionis formed and etching is performed, the third resist maskhas a first slitand a second slitthe second slitexposing a peripheral portionof a mirror portionand the first slitsexposing a peripheral portionof the actuator body portionand a portion of the SiOlayeron the actuator body portionand having a width wider than the second slit