The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Nov. 26, 2012
Applicant:
Chung Hua University, Hsinchu, TW;
Inventor:
Jium Ming Lin, Hsinchu, TW;
Assignee:
CHUNG HUA UNIVERSITY, Hsinchu, TW;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/00 (2006.01); B32B 37/12 (2006.01); C23C 16/48 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
G01P 15/008 (2013.01); B32B 37/12 (2013.01); C23C 16/487 (2013.01); C23C 16/56 (2013.01); Y10T 29/49002 (2015.01); Y10T 156/10 (2015.01);
Abstract
A thermal convection-type accelerometer includes a first insulating substrate, a circuit formed on the first insulating substrate, a first acceleration-sensing device coupled with the circuit, and a first supporting layer attached on the insulating substrate. The first acceleration-sensing device includes two temperature-sensing components and a heater disposed between the temperature-sensing components. The temperature-sensing components and the heater are directly formed on the first supporting layer.