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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9267961 B1

PDFFull Text
Expired
Date of Patent:
Feb. 23, 2016

Filed:

Nov. 26, 2012

Thermal convection-type accelerometer

Applicant:

Chung Hua University, Hsinchu, TW;

Inventor:

Jium Ming Lin, Hsinchu, TW;

Assignee:

CHUNG HUA UNIVERSITY, Hsinchu, TW;

Attorneys:

WPAT, P.C.

Anthony King

Primary Examiner:

Hezron E Williams

Assistant Examiner:

Mark A Shabman

Int. Cl.
CPC ...
G01P 15/00 (2006.01); B32B 37/12 (2006.01); C23C 16/48 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
G01P 15/008 (2013.01); B32B 37/12 (2013.01); C23C 16/487 (2013.01); C23C 16/56 (2013.01); Y10T 29/49002 (2015.01); Y10T 156/10 (2015.01);
Abstract

A thermal convection-type accelerometer includes a first insulating substrate, a circuit formed on the first insulating substrate, a first acceleration-sensing device coupled with the circuit, and a first supporting layer attached on the insulating substrate. The first acceleration-sensing device includes two temperature-sensing components and a heater disposed between the temperature-sensing components. The temperature-sensing components and the heater are directly formed on the first supporting layer.

Find Patent Forward Citations

Lin, Jium. (2016). Thermal convection-type accelerometer (U.S. Patent No. 9267961). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9267961

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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