The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Aug. 30, 2013
Mira Park, Suwon-si, KR;
Younghoon Sohn, Incheon, KR;
Yusin Yang, Seoul, KR;
Sangkil Lee, Yongin-si, KR;
Yong Deok Jeong, Hwaseong-si, KR;
Mira Park, Suwon-si, KR;
Younghoon Sohn, Incheon, KR;
Yusin Yang, Seoul, KR;
Sangkil Lee, Yongin-si, KR;
Yong Deok Jeong, Hwaseong-si, KR;
Abstract
Methods and apparatuses for inspecting a semiconductor device using electron beam are provided. The methods may include performing detection operations on a detection target pattern N times and determining a number of detection operations which have been performed until a maximum secondary electron amount of the detection target pattern is obtained. Each of the detection operations may include irradiating the detection target pattern with an electron beam, interrupting the irradiating and detecting a secondary electron amount of the detection target pattern after a detection waiting time has elapsed since the interrupting the irradiating.