The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Jan. 12, 2012
Manabu Komatsu, Kawasaki, JP;
Masafumi Kyogaku, Yokohama, JP;
Hiroyuki Hashimoto, Yokohama, JP;
Naofumi Aoki, Nagoya, JP;
Manabu Komatsu, Kawasaki, JP;
Masafumi Kyogaku, Yokohama, JP;
Hiroyuki Hashimoto, Yokohama, JP;
Naofumi Aoki, Nagoya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
Provided is a sample analysis method of irradiating a sample with a primary ion beam to analyze a secondary ion emitted from the sample by mass spectrometry, the sample analysis method including the steps of cooling a sample placed in a chamber; forming an ice layer on a surface of the cooled sample by discharging one of water and an aqueous solution to the chamber; and irradiating the surface of the sample with the primary ion beam with the ice layer being formed thereon, wherein an amount of the water forming the ice layer is 0.1 ng/mmor more and 20 ng/mmor less.