The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Apr. 04, 2012
Applicants:
Siegfried Krassnitzer, Feldkirch, AT;
Daniel Lendi, Grabs, CH;
Markus Lechthaler, Feldkirch, AT;
Kurt Ruhm, Schaanwald, LI;
Inventors:
Siegfried Krassnitzer, Feldkirch, AT;
Daniel Lendi, Grabs, CH;
Markus Lechthaler, Feldkirch, AT;
Kurt Ruhm, Schaanwald, LI;
Assignee:
OERLIKON SURFACE SOLUTIONS AG, TRUBBACH, Trubbach, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01); C23C 14/35 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3485 (2013.01); C23C 14/3407 (2013.01); C23C 14/3492 (2013.01); C23C 14/352 (2013.01); H01J 37/3467 (2013.01);
Abstract
The invention relates to a method for supplying power impulses for PVD sputtering cathodes subdivided into partial cathodes. In said method, the power impulse intervals acting on the partial cathodes are selected in such a way as to overlap, thereby dispensing with the need to interrupt the drawing of power supplied by the generator.