The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 23, 2016

Filed:

Mar. 12, 2014
Applicant:

Versana Micro Inc., Scottsdale, AZ (US);

Inventor:

Bishnu Prasanna Gogoi, Scottsdale, AZ (US);

Assignee:

VERSANA MICRO INC, Scottsdale, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/02 (2006.01); H01L 27/14 (2006.01); H01L 27/22 (2006.01); H01L 27/16 (2006.01); H05K 7/02 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
B81B 7/02 (2013.01); H01L 27/14 (2013.01); H01L 27/16 (2013.01); H01L 27/22 (2013.01); H01L 41/1132 (2013.01); H01L 41/1138 (2013.01); H05K 7/02 (2013.01);
Abstract

An integrated circuit having an indirect sensor and a direct sensor formed on a common semiconductor substrate is disclosed. The direct sensor requires the parameter being measured to be directly applied to the direct sensor. Conversely, the indirect sensor can have the parameter being measured to be indirectly applied to the indirect sensor. The parameter being measured by the direct sensor is different than the parameter being measured by the indirect sensor. In other words, the direct sensor and indirect sensor are of different types. An example of a direct sensor is a pressure sensor. The pressure being measured by the pressure sensor must be applied to the pressure sensor. An example of an indirect sensor is an accelerometer. The rate of change of velocity does not have to be applied directly to the accelerometer. In one embodiment, the direct and indirect sensors are formed using photolithographic techniques.


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