The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Nov. 14, 2011
Applicants:
Leif Steen Johansen, Kgs. Lyngby, DK;
Jan Tue Ravnkilde, Hedehusene, DK;
Pirmin Hermann Otto Rombach, Kongens Lyngby, DK;
Kurt Rasmussen, Herlev, DK;
Dennis Mortensen, Frederiksberg C, DK;
Inventors:
Leif Steen Johansen, Kgs. Lyngby, DK;
Jan Tue Ravnkilde, Hedehusene, DK;
Pirmin Hermann Otto Rombach, Kongens Lyngby, DK;
Kurt Rasmussen, Herlev, DK;
Dennis Mortensen, Frederiksberg C, DK;
Assignee:
EPCOS AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); H04R 19/00 (2006.01); B81C 1/00 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0086 (2013.01); B81C 1/00158 (2013.01); B81C 1/00698 (2013.01); H04R 19/005 (2013.01); H04R 31/006 (2013.01); H04R 2201/003 (2013.01); Y10T 428/24273 (2013.01);
Abstract
A MEMS backplate enables MEMS microphones with reduced parasitic capacitance. The MEMS backplate includes a central area and a perforation in the central area. A suspension area surrounds the central area at least partially. An aperture is disposed in the suspension area.