The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Nov. 23, 2011
Michael J. Eacobacci, Jr., South Attleboro, MA (US);
Allen J. Bartlett, New London, NH (US);
John J. Casello, Norton, MA (US);
Jeffrey A. Wells, Milford, NH (US);
Michael J. Eacobacci, Jr., South Attleboro, MA (US);
Allen J. Bartlett, New London, NH (US);
John J. Casello, Norton, MA (US);
Jeffrey A. Wells, Milford, NH (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.