The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Dec. 15, 2014
Applicant:
Zetta Research and Development Llc—aqt Series, Wilmington, DE (US);
Inventors:
Brian Josef Bartholomeusz, Palo Alto, CA (US);
Michael Bartholomeusz, Phoenix, AZ (US);
Assignee:
ZETTA RESEARCH AND DEVELOPMENT LLC—AQT SERIES, Wilmington, DE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/18 (2006.01); H01L 31/032 (2006.01); H01L 31/0352 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); H01L 31/0322 (2013.01); H01L 31/0352 (2013.01); H01L 21/02521 (2013.01); H01L 21/02532 (2013.01); H01L 21/02568 (2013.01); H01L 21/02631 (2013.01); Y02E 10/541 (2013.01);
Abstract
Methods are described for depositing thin films, such as those used in forming a photovoltaic cell or device. In particular embodiments, one or more layers are deposited on a substrate by plasma spraying over the substrate. A grain size of grains in each of the one or more layers is at least approximately two times greater than a thickness of the respective layer. Accordingly, large flat-grained structures are formed in each respective layer, and grain boundaries within each respective layer can be minimized.