The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 2016

Filed:

Jul. 25, 2013
Applicant:

Gold Standard Simulations Ltd., Glasgow, Scotland, GB;

Inventor:

Asen Asenov, Glasgow, GB;

Assignee:

SemiWise Limited, Glasgow, Scotland, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/49 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78 (2013.01); H01L 29/1041 (2013.01); H01L 29/4983 (2013.01); H01L 29/66477 (2013.01); H01L 29/66545 (2013.01); H01L 29/66621 (2013.01); H01L 29/66651 (2013.01); H01L 29/7833 (2013.01);
Abstract

The structure, and fabrication method thereof, implements a fully depleted silicon-on-insulator (SOI) transistor using a 'Channel Last' procedure in which the active channel is a low-temperature epitaxial layer in an etched recess in the SOI silicon film. An optional δ-layer of extremely high doping allows its threshold voltage to be set to a desired value. Based on high-K metal gate last technology, this transistor has reduced threshold uncertainty and superior source and drain conductance. The use of epitaxial layer improves the thickness control of the active channel and reduces the process induced variations. The utilization of active silicon layer that is two or more times thicker than those used in conventional fully depleted SOI devices, reduces the access resistance and improves the on-current of the SOI transistor.


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