The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Mar. 28, 2013
Applicant:
Ams International Ag, Rapperswil-Jona, CH;
Inventors:
Assignee:
ams International AG, Rapperswil-Jona, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 9/00 (2006.01); H01L 27/16 (2006.01); G01N 27/18 (2006.01); H01L 37/00 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
H01L 27/16 (2013.01); G01N 27/18 (2013.01); H01L 37/00 (2013.01); G01N 33/004 (2013.01);
Abstract
An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate having a major surface. The integrated circuit also includes a thermal conductivity based gas sensor having an electrically resistive sensor element located on the major surface for exposure to a gas to be sensed. The integrated circuit further includes a barrier located on the major surface for inhibiting a flow of the gas across the sensor element.