The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Jun. 21, 2011
Sungho Kim, Seoul, KR;
Choonsik Kim, Cheonan-si, KR;
Yongtaek Eom, Hwaseong-si, KR;
Hyuntaek OH, Daejeon, KR;
Hyungkeun Park, Cheonan-si, KR;
Sungho Kim, Seoul, KR;
Choonsik Kim, Cheonan-si, KR;
Yongtaek Eom, Hwaseong-si, KR;
Hyuntaek Oh, Daejeon, KR;
Hyungkeun Park, Cheonan-si, KR;
SEMES CO., LTD., Chungcheongnam-do, KR;
Abstract
A substrate treating apparatus is provided. The substrate treating apparatus includes a loading/unloading unit, a process unit in which a substrate treating process is performed, a loadlock unit disposed between the loading/unloading unit and the process unit, and a carrying member transferring a substrate between the process unit and the loadlock unit. Herein, the carrying member is provided in the process unit and the loadlock unit, and the loading/unloading unit, the loadlock unit, and the process unit are sequentially disposed.