The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 2016

Filed:

Sep. 17, 2013
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Steven Verhaverbeke, San Francisco, CA (US);

Omkaram Nalamasu, San Jose, CA (US);

Majeed A. Foad, Sunnyvale, CA (US);

Mahalingam Venkatesan, San Jose, CA (US);

Nety M. Krishna, Sunnyvale, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/48 (2006.01); C23C 14/04 (2006.01); G11B 5/84 (2006.01); C23C 14/58 (2006.01); C23C 14/18 (2006.01); G11B 5/855 (2006.01);
U.S. Cl.
CPC ...
G11B 5/84 (2013.01); C23C 14/185 (2013.01); C23C 14/48 (2013.01); C23C 14/5826 (2013.01); C23C 14/5833 (2013.01); G11B 5/855 (2013.01); H01J 2237/3365 (2013.01);
Abstract

A method for patterning a magnetic thin film on a substrate includes: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements. Energized ions are generated with sufficient energy to penetrate selective regions and a portion of the magnetic thin film adjacent the selective regions. The substrate is placed to receive the energized ions. The portions of the magnetic thin film are rendered to exhibit a magnetic property different than selective other portions. A method for patterning a magnetic media with a magnetic thin film on both sides of the media is also disclosed.


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