The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Mar. 26, 2004
Masanobu Kusunoki, Wakayama, JP;
Keitaro Harada, Yamagata, JP;
Masayoshi Yokoo, Yamagata, JP;
Yoshinobu Takano, Yamagata, JP;
Masanobu Kusunoki, Wakayama, JP;
Keitaro Harada, Yamagata, JP;
Masayoshi Yokoo, Yamagata, JP;
Yoshinobu Takano, Yamagata, JP;
TOHOKU SEIKI INDUSTRIES, LTD., Yamagata, JP;
Abstract
This is a thin film forming apparatus which is equipped with a target constructed of a thin film material, a cathode for generating a particulate thin film material from the target, a supporting member for supporting the substrate on which the particulate thin film material is to be deposited, a heater for heating the substrate, and a guide for introducing the particulate thin film material onto a surface of the substrate where the thin film material is deposited, wherein the supporting member supports the substrate so as to expose the first principal surface and its backside (second principal surface) of the substrate, the target is disposed in a position for producing the particulate thin film material in an extension of the first principal surface of the substrate, and the guide is disposed on the first principal surface and the second principal surface of the substrate.