The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Oct. 17, 2012
Applicant:
Samsung Display Co. Ltd., Yongin-si, Gyeonggi-do, KR;
Inventors:
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 9/00 (2006.01); C23C 14/12 (2006.01); H01L 51/56 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01); C23C 14/50 (2006.01); H01L 27/28 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/12 (2013.01); C23C 14/50 (2013.01); H01L 21/6776 (2013.01); H01L 21/67173 (2013.01); H01L 21/67709 (2013.01); H01L 21/6831 (2013.01); H01L 51/56 (2013.01); H01L 27/28 (2013.01); H01L 51/001 (2013.01); H01L 2227/323 (2013.01);
Abstract
An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method, and in particular, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate and enables high-definition patterning, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method.