The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
May. 24, 2011
Applicants:
Toshimitsu Kohara, Takasago, JP;
Hiroshi Tamagaki, Takasago, JP;
Yoshimitsu Ikari, Takasago, JP;
Inventors:
Assignee:
Kobe Steel, Ltd., Kobe-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/00 (2006.01); H01J 37/32 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0073 (2013.01); C23C 14/0036 (2013.01); C23C 14/081 (2013.01); C23C 14/3492 (2013.01); H01J 37/32752 (2013.01);
Abstract
In forming alumina films on substrates by sputtering of an aluminum metal target in an oxidizing gas-containing atmosphere, film formation is carried out intermittently in a plurality of substeps while restricting a thickness of the film formed in each substep to at most 5 nm. A turntable is disposed to face a direction of sputtering of the aluminum metal target and the substrates are fixed to the turntable.