The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 09, 2016

Filed:

Oct. 05, 2010
Applicant:

Vladimir Gorokhovsky, San Antonio, TX (US);

Inventor:

Vladimir Gorokhovsky, San Antonio, TX (US);

Assignee:

Nano-Product Engineering, LLC, Lafayette, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32055 (2013.01); C23C 14/0605 (2013.01); C23C 14/0641 (2013.01); C23C 14/0647 (2013.01); C23C 14/325 (2013.01); H01J 37/3266 (2013.01); H01J 37/32614 (2013.01); H01J 37/32623 (2013.01);
Abstract

The invention provides an arc coating apparatus having a steering magnetic field source comprising steering conductors () disposed along the short sides () of a rectangular target () behind the target, and a magnetic focusing system disposed along the long sides () of the target () in front of the target which confines the flow of plasma between magnetic fields generated on opposite long sides () of the target (). The plasma focusing system can be used to deflect the plasma flow off of the working axis of the cathode. Each steering conductor () can be controlled independently. In a further embodiment, electrically independent steering conductors () are disposed along opposite long sides () of the cathode plate (), and by selectively varying a current through one conductor, the path of the arc spot shifts to widen the erosion corridor. The invention also provides a plurality of internal anodes, and optionally a surrounding anode for deflecting the plasma flow.


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