The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2016
Filed:
Jun. 10, 2014
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Takao Ogura, Yokohama, JP;
Shuji Yamada, Atsugi, JP;
Masatoshi Watanabe, Isehara, JP;
Takeo Tsukamoto, Kawasaki, JP;
Yoichi Ikarashi, Fujisawa, JP;
Tadayuki Yoshitake, Tokyo, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/08 (2006.01); H05G 1/06 (2006.01);
U.S. Cl.
CPC ...
H01J 35/08 (2013.01); H01J 2235/081 (2013.01); H01J 2235/087 (2013.01); H01J 2235/1204 (2013.01); H01J 2235/1291 (2013.01); H05G 1/06 (2013.01);
Abstract
A transmissive target includes a target layer configured to include target metal and generate X-ray when receiving electrons and a substrate configured to support the target layer and include carbon as a main component. A carbide region including carbide of the target metal and a non-carbide region including the target metal are disposed in a mixed manner on a boundary surface between the substrate and the target layer on a target layer side.