The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2016
Filed:
Apr. 10, 2014
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Ki-Seong Seo, Seoul, KR;
Sung-Hoon Yang, Seoul, KR;
Tae-Young Ahn, Suwon-si, KR;
Sang-Wook Lee, Busan, KR;
Jung-Yun Jo, Namyangju-si, KR;
Heon-Sik Ha, Osan-si, KR;
Jin-Ho Hwang, Osan-si, KR;
Kyung-Tea Park, Seoul, KR;
Jun-Mo Im, Seoul, KR;
SAMSUNG DISPLAY CO., LTD., , KR;
Abstract
A method of manufacturing a display substrate includes forming a gate electrode on a base substrate, forming an active pattern which includes an oxide semiconductor and overlaps with the gate electrode, forming an etch stopper which partially covers the active pattern, and performing a plasma treatment process to promote a reduction reaction to portions of the active pattern exposed by the etch stopper, thereby forming a source electrode and a drain electrode.