The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9252183 B1

PDF
Full Text
Expired
Date of Patent:
Feb. 02, 2016

Filed:

Jan. 14, 2014
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Masaki Kurihara, Koza-gun, JP;

Daisuke Shimoyama, Aiko-gun, JP;

Masataka Ito, Chigasaki, JP;

Kyouhei Watanabe, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14685 (2013.01); H01L 27/14621 (2013.01); H01L 27/14627 (2013.01);
Abstract

When forming a hollow portion between each color filter, in order to realize the formation of the hollow portions with a narrower width, a plurality of light receiving portions are formed on the upper surface of a semiconductor substrate, a plurality of color filters corresponding to each of the light receiving portions are formed above the semiconductor substrate, a photoresist is formed on each color filter, side walls are formed on the side surfaces of the photoresist, and a hollow portion is formed between each color filter by performing etching using at least the side walls as a mask.


Find Patent Forward Citations

Kurihara, Masaki. (2016). Solid state image pickup apparatus and method for manufacturing the same (U.S. Patent No. 9252183). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9252183

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