The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 02, 2016

Filed:

Feb. 26, 2013
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Akiko Kakutani, Yokohama, JP;

Kazuo Hayashi, Yokohama, JP;

Akihiro Osanai, Yokohama, JP;

Kiyokazu Sato, Tokyo, JP;

Takeshi Yoshiyuki, Yokohama, JP;

Tsutomu Kurusu, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 27/24 (2006.01); H01J 49/16 (2006.01);
U.S. Cl.
CPC ...
H01J 27/24 (2013.01); H01J 49/161 (2013.01); H01J 49/162 (2013.01); H01J 49/164 (2013.01);
Abstract

According to one embodiment, there is provided a laser ion source. The laser ion source includes a vacuum chamber which is vacuum-exhausted and in which a target is transported and set, a valve which is opened when the target is transported into the vacuum chamber and is closed except for the transportation, a target supply chamber which holds the target to be movable, and a transportation unit which transports to the vacuum chamber the target held on the target supply chamber while opening the valve after the target supply chamber is vacuum-exhausted while closing the valve.


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