The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 02, 2016

Filed:

Jul. 23, 2009
Applicants:

Jean-charles Fiaccabrino, Grandevent, CH;

Gilles Rey-mermet, Monthey, CH;

Inventors:

Jean-Charles Fiaccabrino, Grandevent, CH;

Gilles Rey-Mermet, Monthey, CH;

Assignee:

Nivarox-FAR S.A., Le Locle, CH;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05K 3/02 (2006.01); H05K 3/10 (2006.01); G03F 7/40 (2006.01); C23C 2/02 (2006.01); C23C 2/26 (2006.01); C25D 5/02 (2006.01); C25D 5/10 (2006.01); G03F 7/00 (2006.01); C25D 1/00 (2006.01); C25D 5/56 (2006.01);
U.S. Cl.
CPC ...
G03F 7/405 (2013.01); C23C 2/02 (2013.01); C23C 2/26 (2013.01); C25D 1/003 (2013.01); C25D 5/022 (2013.01); C25D 5/10 (2013.01); G03F 7/0035 (2013.01); C25D 5/56 (2013.01); Y10T 29/49155 (2015.01);
Abstract

The method of fabricating a multi-level, metallic microstructure includes the steps consisting in structuring a first layer of photosensitive resin so as to obtain a first level of a resin mould, the aperture in the first resin layer revealing a conductive surface of a substrate, structuring a second photosensitive resin layer over the first level of a resin mould so as to obtain a multi-level resin mould, the apertures in the multi-level mould revealing the conductive surface of the substrate, galvanically depositing a metal or alloy in the apertures of the multi-level resin mould and separating a multi-level metallic structure formed by the metal or alloy deposited in the apertures from the substrate and the multi-level resin mould.


Find Patent Forward Citations

Loading…