Nonwoven fabric polishing roll and method of manufacturing same

Abstract

To provide a nonwoven fabric polishing roll that can reduce the occurrence of polishing defects and carry out uniform polishing. A nonwoven fabric polishing roll having a through hole in to which a rotation shaft of a polishing machine is inserted, and the internal surface of the through hole engages with the rotation shaft so that the torque of the rotation shaft is transmitted, the nonwoven fabric polishing roll comprising: a plurality of circular nonwoven fabrics having an aperture in the center thereof that forms the through hole; and a plurality of circular plates having an aperture in the center thereof that forms the through hole, and having an outer diameter that is smaller than the outer diameter of the circular nonwoven fabric, wherein the plurality of circular nonwoven fabric and the plurality of the circular plates are stacked so that one or two or more of the circular nonwoven fabrics are sandwiched on their aperture side by the circular plates, and bonded together with adhesive while compressed in the stacking direction, and the compression deformation ratio of the circular plates with respect to pressure forces from a direction normal to the stacking direction is smaller than that of the circular nonwoven fabric.