The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
Jun. 30, 2010
Applicants:
Morito Akiyama, Saga, JP;
Kazuhiko Kano, Aichi-ken, JP;
Akihiko Teshigahara, Aichi-ken, JP;
Inventors:
Assignees:
DENSO CORPORATION, Aichi, JP;
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); H03H 3/02 (2006.01); C23C 14/06 (2006.01);
U.S. Cl.
CPC ...
H03H 3/02 (2013.01); C23C 14/0036 (2013.01); C23C 14/0617 (2013.01); C23C 14/0641 (2013.01); Y10T 428/24355 (2015.01);
Abstract
A method for manufacturing a piezoelectric thin film including an aluminum nitride thin film containing scandium on a substrate, the method includes: sputtering step for sputtering aluminum and scandium under an atmosphere containing at least a nitrogen gas. In the sputtering step in the method according to the present invention, a scandium content rate falls within the range from 0.5% by atom to 50% by atom when a temperature of the substrate falls within the range from 5° C. to 450° C. during the sputtering step.