The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
Feb. 08, 2012
Applicant:
Hideyuki Eguchi, Chiyoda-ku, JP;
Inventor:
Hideyuki Eguchi, Chiyoda-ku, JP;
Assignee:
KONICA MINOLTA, INC., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 49/02 (2006.01); H01L 41/316 (2013.01); C30B 23/02 (2006.01); C30B 29/32 (2006.01); C23C 14/00 (2006.01); C23C 14/08 (2006.01); C23C 14/35 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); C23C 14/0036 (2013.01); C23C 14/088 (2013.01); C23C 14/352 (2013.01); C30B 23/025 (2013.01); C30B 29/32 (2013.01); H01L 28/55 (2013.01); H01L 41/316 (2013.01); H01L 21/022 (2013.01); H01L 21/02197 (2013.01); H01L 21/02266 (2013.01); Y10T 428/12812 (2015.01);
Abstract
In order to obtain a ferroelectric thin film having good crystallinity and realizing high piezoelectric properties, and a production method therefor, provided is a ferroelectric thin film constituting a dielectric material having a perovskite structure that comprises Zr and Ti formed on a substrate, wherein a layer having a Zr ratio that is smaller than a predetermined ratio and having good crystallinity and a layer that realizes good piezoelectric properties and has a Zr ratio that is about as great as the predetermined ratio are combined. A production method is also provided.