logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9246079 B1

PDFFull Text
Date of Patent:
Jan. 26, 2016

Filed:

Nov. 15, 2012

Piezoelectric thin-film resonator and method for producing piezoelectric thin film

Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

Inventors:

Keiichi Umeda, Nagaokakyo, JP;

Takashi Miyake, Nagaokakyo, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Kyoto, JP;

Attorney:

Keating & Bennett, LLP

Primary Examiner:

Shawki S Ismail

Assistant Examiner:

Bryan Gordon

Int. Cl.
CPC ...
H01L 41/18 (2006.01); H01L 41/316 (2013.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 3/04 (2006.01); H01L 41/187 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/18 (2013.01); H01L 41/187 (2013.01); H01L 41/316 (2013.01); H03H 3/04 (2013.01); H03H 9/02015 (2013.01); H03H 9/02157 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 2003/021 (2013.01); H03H 2003/025 (2013.01);
Abstract

A piezoelectric thin-film resonator includes a piezoelectric thin film which includes aluminum nitride containing Sc and which has a concentration distribution such that the concentration of Sc is non-uniform in a thickness direction of the piezoelectric thin film; a first electrode; a second electrode facing the first electrode across the piezoelectric thin film; and a substrate supporting a piezoelectric vibrating section defined by the piezoelectric thin film and the first and second electrodes.

Find Patent Forward Citations

Umeda, Keiichi. (2016). Piezoelectric thin-film resonator and method for producing piezoelectric thin film (U.S. Patent No. 9246079). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9246079

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…