The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
Feb. 07, 2013
Mcube, Incorporated, San Jose, CA (US);
Dolf van der Heide, San Jose, CA (US);
Shingo Yoneoka, San Jose, CA (US);
mCube, Inc., San Jose, CA (US);
Abstract
An integrated MEMS inertial sensor device includes one or more three-axis MEMS inertial sensor devices, such as accelerometers, with dual or single proof mass configurations. These designs can be compact and can decouple the motion of each axis to minimize the measurement errors due to cross-axis sensitivity. Some embodiments include a frame to decouple the motion of two axes and to provide geometric symmetry. Some embodiments also include double-folded springs. In a specific embodiment, the three axes of an integrated MEMS accelerometer device are entirely decoupled. Thus, the actuation of each axis, through a force due to acceleration, has little or substantially no effect on the other axes.