The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2016

Filed:

Jul. 02, 2014
Applicant:

Samsung Electro-mechanics Co., Ltd., Suwon-Si, KR;

Inventors:

In Hyuk Song, Suwon-Si, KR;

Jae Hoon Park, Suwon-Si, KR;

Dong Soo Seo, Suwon-Si, KR;

Chang Su Jang, Suwon-Si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/00 (2006.01); H01L 21/336 (2006.01); H01L 29/739 (2006.01); H01L 29/66 (2006.01); H01L 21/265 (2006.01); H01L 29/36 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7397 (2013.01); H01L 21/265 (2013.01); H01L 21/26513 (2013.01); H01L 29/36 (2013.01); H01L 29/66348 (2013.01);
Abstract

A power semiconductor device may include: a base substrate including a first conductive type drift layer; a second conductive type semiconductor substrate disposed on the other surface of the base substrate; a first conductive type diffusion layer disposed in the base substrate and having an impurity concentration higher than that of the drift layer; a second conductive type well layer disposed inside of one surface of the base substrate; a trench formed from one surface of the base substrate including the well layer so as to penetrate through the diffusion layer in a depth direction; a first insulation film disposed on a surface of the base substrate; and a first electrode disposed in the trench. A peak point of an impurity doping concentration of the diffusion layer in a transverse direction may be positioned in a region contacting a side surface of the trench.


Find Patent Forward Citations

Loading…