Method of manufacturing semiconductor device

Abstract

A method of manufacturing a semiconductor device includes forming a sacrificial pattern, forming a first stacked structure including first material layers and second material layers alternately stacked on the sacrificial pattern, forming first semiconductor patterns passing through the first stacked structure and dielectric multi-layers surrounding the first semiconductor patterns, forming a slit passing through the first stacked structure and exposing the sacrificial pattern, forming a spacer on an inner wall of the slit, forming a first opening by removing the sacrificial pattern through the slit, forming a second opening by partially removing the dielectric multi-layers through the first opening to expose lower portions of the first semiconductor patterns, and forming a connection pattern in contact with the first semiconductor patterns in the first and second openings.