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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9244351 B1

PDFFull Text
Date of Patent:
Jan. 26, 2016

Filed:

Nov. 23, 2012

Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns

Applicants:

Sung-jae Lee, Uiwang-si, KR;

Joon-young Moon, Uiwang-si, KR;

Youn-jin Cho, Uiwang-si, KR;

Young-min Kim, Uiwang-si, KR;

Yong-woon Yoon, Uiwang-si, KR;

Inventors:

Sung-Jae Lee, Uiwang-si, KR;

Joon-Young Moon, Uiwang-si, KR;

Youn-Jin Cho, Uiwang-si, KR;

Young-Min Kim, Uiwang-si, KR;

Yong-Woon Yoon, Uiwang-si, KR;

Assignee:

CHEIL INDUSTRIES, INC., Gumi-si, Gyeongsangbuk-do, KR;

Attorney:

Lee & Morse, P.C.

Primary Examiner:

Cynthia Hamilton

Int. Cl.
CPC ...
G03F 7/40 (2006.01); G03F 7/11 (2006.01); G03F 7/09 (2006.01); H01L 21/027 (2006.01); G03F 7/075 (2006.01); H01L 21/033 (2006.01);
U.S. Cl.
CPC ...
G03F 7/094 (2013.01); G03F 7/0752 (2013.01); G03F 7/09 (2013.01); G03F 7/091 (2013.01); G03F 7/40 (2013.01); H01L 21/0276 (2013.01); H01L 21/0332 (2013.01);
Abstract

A composition for a hardmask including copolymer including repeating units represented by Chemical Formulae 1 and 2 and a solvent, a method of forming a pattern using the same, and a semiconductor integrated circuit device including a pattern formed using the method are provided.

Find Patent Forward Citations

Lee, Sung-Jae. (2016). Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns (U.S. Patent No. 9244351). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9244351

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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