The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
Oct. 05, 2009
Hiromitsu Soneda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Norinao Kouma, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
Hiromitsu Soneda, Kawasaki, JP;
Tsuyoshi Matsumoto, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Norinao Kouma, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
DRNC Holdings, Inc., Wilmington, DE (US);
Abstract
A micro movable device includes: a micro movable substrate in which a micro movable unit is formed, the micro movable unit including a frame, a movable part, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part; a supporting substrate; and a reinforced fixed part provided between the frame and the supporting substrate, and including a first spacer that joins the frame to the supporting substrate and an adhesive part that covers the first spacer and joins the frame to the supporting substrate, wherein the frame includes a first area facing the movable part in a direction of extent of the axial center, and a second area different from the first area, and the reinforced fixed part is bonded to the second area of the frame.