The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
Jun. 16, 2014
Applicant:
Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;
Inventors:
Daisuke Ohgarane, Hadano, JP;
Koji Dairiki, Atsugi, JP;
Masahiro Takahashi, Atsugi, JP;
Shunichi Ito, Atsugi, JP;
Erika Takahashi, Atsugi, JP;
Assignee:
Semiconductor Energy Laboratory Co., Ltd., Kanagawa-ken, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/205 (2006.01); G01N 23/20 (2006.01); H01J 37/06 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2055 (2013.01); G01N 23/20058 (2013.01); H01J 37/06 (2013.01); G01N 2223/61 (2013.01);
Abstract
Provided is a transmission electron diffraction measurement apparatus including an electron gun; a first optical system under the electron gun; a sample chamber under the first optical system; a second optical system under the sample chamber; an observation chamber under the second optical system; a region that emits light by receiving energy from an electron in the observation chamber; and a camera facing the region.