The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2016

Filed:

Jul. 29, 2011
Applicants:

Lothar Dietrich, Werder, DE;

Ralf Schmidt, Ahrensfelde, DE;

Andreas Ostmann, Berlin, DE;

Inventors:

Lothar Dietrich, Werder, DE;

Ralf Schmidt, Ahrensfelde, DE;

Andreas Ostmann, Berlin, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 5/08 (2006.01); C25D 17/00 (2006.01); C25D 21/10 (2006.01); C23C 18/16 (2006.01); C25D 11/00 (2006.01); C25D 21/12 (2006.01); F17D 3/00 (2006.01); H01L 21/02 (2006.01); C25D 5/02 (2006.01);
U.S. Cl.
CPC ...
C25D 5/08 (2013.01); C23C 18/1628 (2013.01); C25D 5/02 (2013.01); C25D 11/00 (2013.01); C25D 17/008 (2013.01); C25D 21/12 (2013.01); F17D 3/00 (2013.01); H01L 21/02 (2013.01); C25D 17/001 (2013.01); Y10T 137/8593 (2015.04);
Abstract

The invention relates to a device and method for producing targeted flow and current density patterns in a chemical and/or electrolytic surface treatment. The device comprises a flow distributor body which is disposed, with the front face thereof, plane-parallel to a substrate to be processed, and which has outlet openings on the front face, through which process solution flows onto the substrate surface. The process solution flowing back from the substrate is led off through connecting passages onto the rear face of the flow distributor body. At the same time a targeted distribution of an electrical field on a conductive substrate surface is effected by a specific arrangement of said connecting passages.


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