The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2016

Filed:

Mar. 07, 2012
Applicants:

Munetaka Hayakawa, Toyota, JP;

Kaoru Ito, Toyota, JP;

Yasuhiko Takahashi, Toyota, JP;

Inventors:

Munetaka Hayakawa, Toyota, JP;

Kaoru Ito, Toyota, JP;

Yasuhiko Takahashi, Toyota, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/56 (2006.01); C23C 16/54 (2006.01); B05D 1/00 (2006.01); B05D 7/04 (2006.01); B05D 7/00 (2006.01); C23C 16/04 (2006.01);
U.S. Cl.
CPC ...
C23C 16/545 (2013.01); B05D 1/60 (2013.01); B05D 7/04 (2013.01); B05D 7/50 (2013.01); C23C 16/042 (2013.01); B05D 2252/02 (2013.01); C23C 14/562 (2013.01);
Abstract

An apparatus is provided that can stably produce a laminated body including a vapor-deposited polymer film having a predetermined composition and thickness on a film substrate. The apparatus includes: a film substrate supply meansthat supplies a film substrateon an outer peripheral surface of a rotary drumin a vacuum chamber; a plurality of blowoff memberspositioned around the rotary drum, each of the plurality of blowoff members including a vapor outletopening inside the vacuum chamberto the outer peripheral surface of the rotary drumand an inner space constituting a deposition chamber; and at least one monomer vapor supply meansarranged to supply plural kinds of monomer vapor into the deposition chamber and blowoff the plural kinds of monomer vapor from the vapor outlet of each of the plurality of blowoff members.


Find Patent Forward Citations

Loading…