The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9243326 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 26, 2016

Filed:

Mar. 17, 2011
Applicants:

Yu Yan Jiang, Nagoya, JP;

Masahide Inagaki, Nagoya, JP;

Kenji Nakashima, Nisshin, JP;

Soichiro Makino, Nagakute, JP;

Nariaki Horinouchi, Nisshin, JP;

Takahiro Ito, Toyota, JP;

Inventors:

Yu Yan Jiang, Nagoya, JP;

Masahide Inagaki, Nagoya, JP;

Kenji Nakashima, Nisshin, JP;

Soichiro Makino, Nagakute, JP;

Nariaki Horinouchi, Nisshin, JP;

Takahiro Ito, Toyota, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45508 (2013.01); C23C 16/45504 (2013.01); C23C 16/45587 (2013.01); C23C 16/45597 (2013.01);
Abstract

A surface treatment apparatus in which a disk-like sample-holding plate is provided inside an enclosure constituting a cylindrical circumferential wall. A cylindrical portion in an upper portion of the enclosure constitutes a material fluid supplying channel, and a channel provided on the lateral side of the sample-holding plate in the enclosure and shaped spreading as it goes farther from the cylindrical portion constitutes a fluid discharge channel. The fluid discharge channel employs a parabola curve or the like in which the position of the upper end of the outmost circumference of the sample-holding plate is defined as a focus position and the position of the upper end of the outlet that is symmetrically opposite to the focus position is defined as a reference position.


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Jiang, Yu. (2016). Surface treatment apparatus (U.S. Patent No. 9243326). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9243326

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