Process for separating monosilane from chlorosilanes-rich mixture

Abstract

A process for separating monosilane from a mixture comprising monosilane and chlorosilanes comprising: a) Introducing mixture to a condenser () for separating lower-boiling chlorosilanes—containing monosilane from higher-boiling chlorosilanes enriched condensates; b) Collecting said higher-boiling condensates, in a condensate buffer () connected to the aforesaid condenser () by a condensate feed pipe (); c) Sending higher-boiling chlorosilanes enriched condensates from the aforesaid condensate buffer () into a subcooler () which is installed on a reflux feed line () connected to the upper portion of a chlorosilane absorber (); d) Feeding lower-boiling chlorosilanes—containing monosilane to the aforesaid chlorosilane absorber () for separating monosilane; e) Extracting monosilane—rich gas from the upper portion of the aforesaid chlorosilane absorber ().