The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2016

Filed:

Sep. 19, 2013
Applicant:

Soitec, Bernin, FR;

Inventors:

Bruce Faure, Paris, FR;

Alexandra Marcovecchio, Grenoble, FR;

Assignee:

SOITEC, Brenin, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 33/00 (2010.01); B32B 37/14 (2006.01);
U.S. Cl.
CPC ...
B32B 37/14 (2013.01); H01L 21/76254 (2013.01); H01L 33/0079 (2013.01); H01L 2924/0002 (2013.01); Y10T 156/10 (2015.01); Y10T 428/265 (2015.01);
Abstract

A method of preventing microcavity formation in a bonding layer of a composite structure resulting from creep and thermal expansion due to high temperature exposure of the composite structure. The method includes the steps of providing a thin film with a thickness of 5 micrometers or less; providing a bonding layer of oxide with a thickness that is equal to or greater than the thickness of the thin film with the bonding layer formed by low pressure chemical vapor deposition. The thin film or support substrate have a mean thermal expansion coefficient of 7×10Kor more. The thin film, bonding layer and support substrate combine to reduce stress in and plastic deformation of the bonding layer during exposure to high temperatures of more than approximately 900° C. to thus prevent microcavities from appearing in the bonding layer.


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