The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 2016

Filed:

Mar. 21, 2013
Applicant:

Tanaka Kikinzoku Kogyo K.k., Tokyo, JP;

Inventors:

Naoji Kashima, Aichi, JP;

Tomonori Watanabe, Aichi, JP;

Shigeo Nagaya, Aichi, JP;

Kunihiro Shima, Gunma, JP;

Shuichi Kubota, Gunma, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 15/04 (2006.01); B32B 9/00 (2006.01); C30B 25/18 (2006.01); B32B 15/01 (2006.01); H01L 39/24 (2006.01); H01L 39/12 (2006.01);
U.S. Cl.
CPC ...
B32B 15/01 (2013.01); B32B 15/04 (2013.01); C30B 25/18 (2013.01); H01L 39/125 (2013.01); H01L 39/2454 (2013.01); H01L 39/2461 (2013.01);
Abstract

The present invention relates to a textured substrate for epitaxial film formation, comprising a textured metal layer at least on one side, wherein the textured metal layer includes a copper layer having a cube texture and a nickel layer having a thickness of 100 to 20000 nm formed on the copper layer; the nickel layer has a nickel oxide layer formed on a surface thereof, having a thickness of 1 to 30 nm, and including a nickel oxide; and the nickel layer further includes a palladium-containing region formed of palladium-containing nickel at an interface with the nickel oxide layer. The top layer of the textured substrate, i.e. the nickel oxide layer, has a surface roughness of preferably 10 nm or less.


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