The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 2016

Filed:

Jun. 20, 2012
Applicants:

Takeshi Sakashita, Tokyo, JP;

Motoaki Hara, Miyagi, JP;

Masafumi Iwaki, Tokyo, JP;

Tsuyoshi Yokoyama, Tokyo, JP;

Shinji Taniguchi, Tokyo, JP;

Tokihiro Nishihara, Tokyo, JP;

Masanori Ueda, Tokyo, JP;

Inventors:

Takeshi Sakashita, Tokyo, JP;

Motoaki Hara, Miyagi, JP;

Masafumi Iwaki, Tokyo, JP;

Tsuyoshi Yokoyama, Tokyo, JP;

Shinji Taniguchi, Tokyo, JP;

Tokihiro Nishihara, Tokyo, JP;

Masanori Ueda, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H03H 9/17 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/60 (2006.01); H03H 9/70 (2006.01);
U.S. Cl.
CPC ...
H03H 9/174 (2013.01); H03H 3/02 (2013.01); H03H 9/02118 (2013.01); H03H 9/132 (2013.01); H03H 9/173 (2013.01); H03H 9/605 (2013.01); H03H 9/706 (2013.01); Y10T 29/42 (2015.01); Y10T 29/49155 (2015.01); Y10T 29/49156 (2015.01);
Abstract

A piezoelectric thin film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least a portion of the upper electrode and that of the lower electrode oppose each other through the piezoelectric film, and at least a portion of the periphery of the upper electrode is reversely tapered.


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