The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2016
Filed:
Apr. 04, 2011
Applicants:
Robert T. Trujillo, Saratoga, CA (US);
Steven C. Beese, Fremont, CA (US);
Yan Rozenzon, San Carlos, CA (US);
Inventors:
Robert T. Trujillo, Saratoga, CA (US);
Steven C. Beese, Fremont, CA (US);
Yan Rozenzon, San Carlos, CA (US);
Assignee:
SolarCity Corporation, San Mateo, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); F16F 15/027 (2006.01); C23C 16/44 (2006.01); C23C 16/52 (2006.01); F16F 15/023 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); C23C 16/44 (2013.01); C23C 16/52 (2013.01); F16F 15/027 (2013.01); F16F 15/0232 (2013.01); F16F 15/0275 (2013.01);
Abstract
One embodiment of the present invention provides a support system for providing dynamic support to a deposition reactor. The system includes a coupling mechanism configured to provide coupling between the deposition reactor and the support system, an attachment mechanism configured to attach the support system to an external frame, and at least one gas bellows situated between the coupling mechanism and the attachment mechanism.