The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2016
Filed:
Mar. 30, 2015
Thin film structures and devices with integrated light and heat blocking layers for laser patterning
Applied Materials, Inc., Santa Clara, CA (US);
Daoying Song, San Jose, CA (US);
Chong Jiang, Cupertino, CA (US);
Byung-Sung Leo Kwak, Portland, OR (US);
Joseph G. Gordon, II, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Selective removal of specified layers of thin film structures and devices, such as solar cells, electrochromics, and thin film batteries, by laser direct patterning is achieved by including heat and light blocking layers in the device/structure stack immediately adjacent to the specified layers which are to be removed by laser ablation. The light blocking layer is a layer of metal that absorbs or reflects a portion of the laser energy penetrating through the dielectric/semiconductor layers and the heat blocking layer is a conductive layer with thermal diffusivity low enough to reduce heat flow into underlying metal layer(s), such that the temperature of the underlying metal layer(s) does not reach the melting temperature, T, or in some embodiments does not reach (T)/3, of the underlying metal layer(s) during laser direct patterning.