The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 2016

Filed:

Mar. 20, 2013
Applicants:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Stmicroelectronics (Crolles 2) Sas, Crolles, FR;

Inventors:

Léa Di Cioccio, Saint Ismier, FR;

Sébastien Mermoz, Meylan, FR;

Loïc Sanchez, Voiron, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 23/00 (2006.01); H01L 21/311 (2006.01); H01L 23/14 (2006.01);
U.S. Cl.
CPC ...
H01L 24/83 (2013.01); H01L 21/311 (2013.01); H01L 23/147 (2013.01);
Abstract

A method for producing at least one pad assembly () on a support () for use in a method for self-assembling at least one element () on the support (), comprises fanning, on the support (), a layer () of at least one fluorinated material around the location () of the pad assembly (), the layer () having a thickness greater than 10 nm. The layer () and the location () are exposed to an ultraviolet treatment in the presence of ozone to form the pad assembly () at said location (), wherein a drop of liquid () having a static contact angle on the pad assembly () less than or equal to 15°, after the exposure to the ultraviolet treatment, has a static contact angle on the layer () greater than or equal to 100°.


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