The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 2016

Filed:

Mar. 27, 2013
Applicant:

Alps Electric Co., Ltd., Tokyo, JP;

Inventors:

Atsushi Tondokoro, Miyagi-ken, JP;

Satoshi Waga, Miyagi-ken, JP;

Takashi Sato, Miyagi-ken, JP;

Shinya Yokoyama, Miyagi-ken, JP;

Sumihito Morita, Miyagi-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 27/26 (2006.01); G01N 27/22 (2006.01); G01N 1/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/223 (2013.01); G01N 1/00 (2013.01); G01N 2201/00 (2013.01); H01L 21/00 (2013.01); Y10T 29/49 (2015.01);
Abstract

A humidity detection sensor includes a lower electrode provided on a board, an upper electrode provided so as to face the lower electrode, a humidity sensing film which is formed at least between the lower electrode and the upper electrode and whose dielectric constant changes in response to humidity, and a protective film provided so as to cover the upper electrode. Each of the upper electrode and the protective film has an opening through which the humidity sensing film is partially exposed to the outside. In the opening, the humidity sensing film is provided so as to reach at least a position higher than the position of the lower surface of the protective film.


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