The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 2016

Filed:

Mar. 11, 2013
Applicant:

Analog Devices Global, Hamilton, BM;

Inventors:

Kamatchi Saravanan Alagarsamy, Bangalore, IN;

William A. Clark, Winchester, MA (US);

Jishnu Choyi, Kerala, IN;

James M. Lee, Northborough, MA (US);

Vikas Choudhary, Bangalaore, IN;

Assignee:

Analog Devices Global, Hamilton, BM;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/02 (2006.01); G01N 35/00 (2006.01); B81B 7/00 (2006.01); B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
B81B 7/02 (2013.01); B81B 7/008 (2013.01); B81C 99/005 (2013.01); G01N 35/00712 (2013.01);
Abstract

A MEMS sensor includes a micro-electromechanical structure, a detection circuit, and a self-test circuit to test the health of the MEMS sensor during runtime operations. The self-test circuit is configured to inject into the micro-electromechanical structure a plurality of injected test signals that are broad-band frequency-varying frequency signals, which are based on spread spectrum based modulation. The injected test signals may a magnitude that is below an observable threshold of the sensor signal as well as a test-signal bandwidth that overlaps with a substantial portion of the sensor bandwidth, including the stimulus of interest.


Find Patent Forward Citations

Loading…