The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2016

Filed:

Jun. 21, 2012
Applicant:

Sang Hun Lee, San Ramon, CA (US);

Inventor:

Sang Hun Lee, San Ramon, CA (US);

Assignee:

Recarbon, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 27/16 (2006.01); H01J 27/18 (2006.01); H05H 7/02 (2006.01); H01J 37/32 (2006.01); H01P 5/12 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H05H 7/02 (2013.01); H01J 37/32247 (2013.01); H01P 5/12 (2013.01); H05H 1/46 (2013.01); H05H 2001/4622 (2013.01);
Abstract

A microwave resonant cavity is provided. The microwave resonant cavity includes: a sidewall having a generally cylindrical hollow shape; a gas flow tube disposed inside the sidewall and having a longitudinal axis substantially parallel to a longitudinal axis of the sidewall; a plurality of microwave waveguides, each microwave waveguide having a longitudinal axis substantially perpendicular to the longitudinal axis of the sidewall and having a distal end secured to the sidewall and aligned with a corresponding one of a plurality of holes formed on the sidewall; a top plate secured to one end of the sidewall; and a sliding short circuit having: a disk slidably mounted between the sidewall and the gas flow tube; and at least one bar disposed inside the sidewall and arranged parallel to the longitudinal axis of the sidewall.


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