The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2016
Filed:
Dec. 03, 2012
Applicant:
Lg Display Co., Ltd., Seoul, KR;
Inventors:
Assignee:
LG Display Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/3065 (2006.01); H01L 29/66 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66742 (2013.01); H01L 27/1248 (2013.01); H01L 27/1288 (2013.01);
Abstract
A method of fabricating an array substrate includes: forming a line or an electrode on a substrate on which a pixel region is defined, forming a protection layer on the line or the electrode, the protection layer formed of silicon nitride (SiN), forming photoresist patterns on the protection layer, and loading the substrate having the photoresist pattern into a chamber of a dry etching apparatus, and performing a first dry etching process on the protection layer exposed between the photoresist patterns using a first gas mixture containing nitrogen trifluoride (NF) gas to form a contact hole exposing the line or the electrode.