The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2016

Filed:

Jan. 06, 2014
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Masaki Kurihara, Koza-gun, JP;

Daisuke Shimoyama, Aiko-gun, JP;

Masataka Ito, Chigasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14685 (2013.01); H01L 27/14621 (2013.01); H01L 27/14627 (2013.01);
Abstract

A color filteris formed above a semiconductor substrate SB, in an area above a predetermined light receiving portion among a plurality of light receiving portions. A sacrificial layeris formed on upper and side of the first color filter. Color filtersandare formed above the semiconductor substrate SB, in areas above other light receiving portions adjacent to the predetermined light receiving portion, to expose at least part of the upper surface area of the first color filteron the sacrificial layer. The sacrificial layeris etched to remove the upper and side areas of the color filteron the sacrificial layerto form hollow portionsbetween the color filterand the color filterand between the color filterand the color filter


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