The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2016
Filed:
May. 28, 2010
Applicant:
Martti Blomberg, Vtt, FI;
Inventor:
Martti Blomberg, Vtt, FI;
Assignee:
TEKNOLOGIAN TUTKIMUSKESKUS VTT, Vtt, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/00 (2006.01); G02B 26/00 (2006.01); B81B 3/00 (2006.01); G01J 3/26 (2006.01);
U.S. Cl.
CPC ...
G02B 26/001 (2013.01); B81B 3/0013 (2013.01); G01J 3/26 (2013.01); B81B 2201/042 (2013.01); B81C 2201/115 (2013.01);
Abstract
Controllable Fabry-Perot interferometers include two mirrors with a space between them. The mirrors are such that at least one layer is made of silicon-rich silicon nitride. Additionally, the mirrors' surfaces are formed to be of a roughness which reduces the risk of the mirrors sticking to each other.